Characterization of silicon nanocrystals embedded in SiO2 matrix

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Author
Liu, Yang
Date of Issue
2005
School
School of Electrical and Electronic Engineering
Abstract
In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates.
Subject
DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Type
Thesis
Rights
Nanyang Technological University
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