Characterization of silicon nanocrystals embedded in SiO2 matrix.
Date of Issue2005
School of Electrical and Electronic Engineering
In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates.
DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Nanyang Technological University