Process development for fabrication of organic thin film transistors

Abstract

Organic semiconductors are deemed as suitable candidates for implementing both circuits and displays on plastic. Transistors made from organic materials have the advantages of low cost, flexibility and reduced thermal budget during device processing.

In this Supplementary Equipment Project (SEP), we aim to establish equipment for vapor phase deposition in high vacuum for investigating organic thin field effect transistors (OTFTs) in aspects of device fabrication, device structures, charge transport mechanism, etc. In this project, a Physical Vapor Deposition (PVD) system has been set up for fabrication and characterization of Organic Thin Film Transistors (OTFTs). This system consists of 3 chambers: (1) Pretreatment Chamber (limit pressure better than 8×10-3 Pa) with gloves for transferring substrates and O2/H2 plasma treatment, (2) Metal Chamber

(limit pressure better than 8×10-5 Pa) for metal/dielectric deposition, (3) Organic Chamber (limit pressure better than 8×10-6 Pa) for organic deposition.