dc.contributor.authorMohammad Olfatnia
dc.date.accessioned2012-01-26T02:14:31Z
dc.date.accessioned2017-07-23T08:40:16Z
dc.date.available2012-01-26T02:14:31Z
dc.date.available2017-07-23T08:40:16Z
dc.date.copyright2011en_US
dc.date.issued2011
dc.identifier.citationOlfatnia, M. (2011). A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/47725
dc.description.abstractThis thesis reports theoretical and experimental study of piezoelectric microdiaphragm platform for physical and biological sensing. The microdiaphragms were first designed and then fabricated by MEMS fabrication processes. Their different characteristics such as frequency behavior, mode shapes, coupling factor, quality factor (Q-factor), nonlinear vibrations, mass sensitivity, and pressure sensitivity were studied theoretically and experimentally. Finally, they have been applied for two different schemes of sensing; mass sensing and pressure sensing. These experimental results demonstrate promising perspective of piezoelectric microdiaphragms as physical and chemical sensors.en_US
dc.format.extent216 p.en_US
dc.language.isoenen_US
dc.subjectDRNTU::Engineering::Mechanical engineering::Mechanics and dynamicsen_US
dc.titleA theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensingen_US
dc.typeThesis
dc.contributor.researchMicroMachines Centreen_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.contributor.supervisorMiao Jianminen_US
dc.contributor.supervisorOng Lin Sengen_US
dc.description.degreeDOCTOR OF PHILOSOPHY (MAE)en_US


Files in this item

FilesSizeFormatView
mG0702756K.pdf8.455Mbapplication/pdfView/Open

This item appears in the following Collection(s)

Show simple item record