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Title: Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer
Authors: Lo, Chee Wai.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Issue Date: 2002
Abstract: This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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