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Title: Development of high dielectric constant SrTiO3 thin films
Authors: Loo, Martin Chih Chien.
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2002
Abstract: This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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