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https://hdl.handle.net/10356/4805| Title: | Development of high dielectric constant SrTiO3 thin films | Authors: | Loo, Martin Chih Chien. | Keywords: | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films | Issue Date: | 2002 | Abstract: | This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques. | URI: | http://hdl.handle.net/10356/4805 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-THESES_802.pdf Restricted Access | 5.34 MB | Adobe PDF | View/Open |
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