Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/4810
Title: Novel structures and materials for microelectromechanical system (MEMS) devices
Authors: Low, Duong Sin.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Issue Date: 2002
Abstract: In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.
URI: http://hdl.handle.net/10356/4810
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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