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https://hdl.handle.net/10356/4810| Title: | Novel structures and materials for microelectromechanical system (MEMS) devices | Authors: | Low, Duong Sin. | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems | Issue Date: | 2002 | Abstract: | In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices. | URI: | http://hdl.handle.net/10356/4810 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-THESES_807.pdf Restricted Access | 18.91 MB | Adobe PDF | View/Open |
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