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https://hdl.handle.net/10356/4812
Title: | Design and fabrication of micro-hotplate for integrated gas sensors | Authors: | Low, Huei Ming. | Keywords: | DRNTU::Engineering::Electrical and electronic engineering | Issue Date: | 2001 | Abstract: | This thesis reports the successful development on the design and fabrication of simple low-power micromachined microhotplates suitable for integrated semiconductor oxide gas sensor applications. | URI: | http://hdl.handle.net/10356/4812 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Theses |
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File | Description | Size | Format | |
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EEE-THESES_809.pdf Restricted Access | 16.18 MB | Adobe PDF | View/Open |
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