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Title: Design and fabrication of micro-hotplate for integrated gas sensors
Authors: Low, Huei Ming.
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2001
Abstract: This thesis reports the successful development on the design and fabrication of simple low-power micromachined microhotplates suitable for integrated semiconductor oxide gas sensor applications.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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