Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography

Abstract

Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially used technique for fabricating nanostructure in semi-conductor and other applications. Using the principle of interference, periodic nanopatterns or structures can be cost effectively fabricated over large areas which are utilized in many applications.