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Title: Corrosion scrap reduction from AMT8330
Authors: Ng, Ti Koon.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 2002
Abstract: In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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