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https://hdl.handle.net/10356/4979
Title: | Particle reduction of novellus PEP3510 photo resist stripper | Authors: | Chai, Koh Chin | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging | Issue Date: | 2005 | Abstract: | The objective of this project is to resolve defect density issues of the Novellus Photo Resist Strip to reduce wafer scrape and improve yield for Chartered Silicon Partners, Fab 6, CHRT. The engineers will be able to use the resolution of the findings and implement across all Novellus Photo Resist Strippers. This includes identifying root cause of the problem, current design limitations, area of improvement, feasibility of new designs and implementation of new design and control method of the new design. | URI: | http://hdl.handle.net/10356/4979 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Theses |
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File | Description | Size | Format | |
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EEE-THESES_96.pdf Restricted Access | 17.82 MB | Adobe PDF | View/Open |
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