Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/4999
Title: Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters
Authors: Ong, Eunice Ho Hui.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Issue Date: 2005
Abstract: This project is carried out with the main purpose of improving line-width uniformity and deviation across each wafer through optimization of the photolithography processes. In order to remain price competitive in the chip market, this project is also aimed at reducing production costs.
URI: http://hdl.handle.net/10356/4999
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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