Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/50732
Title: Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications
Authors: Amir Heidari
Keywords: DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Issue Date: 2012
Source: Amir, H. (2012). Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: Mass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by different research groups using different techniques such as NEMS resonators, high frequency quartz crystal microbalances (QCMs), surface acoustic waves (SAWs), and film bulk acoustic resonators (FBARs). The main objective of this work has been to improve the performance of microresonators as mass-sensitive biochemical sensors. In this study, two particular resonator types are designed, fabricated and their mass sensitivities characteristics are studied in both gaseous and liquid environments.
URI: https://hdl.handle.net/10356/50732
DOI: 10.32657/10356/50732
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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