dc.contributor.authorAmir Heidari
dc.date.accessioned2012-10-01T01:29:42Z
dc.date.accessioned2017-07-23T08:40:32Z
dc.date.available2012-10-01T01:29:42Z
dc.date.available2017-07-23T08:40:32Z
dc.date.copyright2012en_US
dc.date.issued2012
dc.identifier.citationAmir, H. (2012). Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/50732
dc.description.abstractMass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by different research groups using different techniques such as NEMS resonators, high frequency quartz crystal microbalances (QCMs), surface acoustic waves (SAWs), and film bulk acoustic resonators (FBARs). The main objective of this work has been to improve the performance of microresonators as mass-sensitive biochemical sensors. In this study, two particular resonator types are designed, fabricated and their mass sensitivities characteristics are studied in both gaseous and liquid environments.en_US
dc.format.extent132 p.en_US
dc.language.isoenen_US
dc.subjectDRNTU::Engineering::Mechanical engineering::Mechanics and dynamicsen_US
dc.subjectDRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systemsen_US
dc.titleDesign, fabrication and characterization of microelectromechanical resonators for chemical and biological applicationsen_US
dc.typeThesis
dc.contributor.supervisor2Yong-Jin Yoonen_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.contributor.supervisorYong-Jin Yoon
dc.contributor.supervisorJulius Tsai Ming Lin
dc.description.degreeDOCTOR OF PHILOSOPHY (MAE)en_US
dc.identifier.doihttps://doi.org/10.32657/10356/50732


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