Report on industrial attachment with Institute Of Microelectronics, A*STAR

Abstract

This report summarises the work done and results obtained during the industry attachment period with IME from 26 July 2010 to 24 December 2010. The work focuses on the design and simulations of a nano-optical linear actuator utilising the optical gradient force. The proposed optical actuator was found to have many advantages over the existing electrostatic comb drive actuator, including stronger force per unit length, smaller device dimensions, avoiding side instability, and immunity to electromagnetic interference and mechanical shock. The optical actuator also allows precise control of deflection through the optical input power control, making it ideal for use in harsh conditions or precise small-deflection applications. The actuator offers a potential application as a self-calibrating mechanical sensor with high sensitivity and reliability.