Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/50910
Title: Design of thin film micro-heater and resistance temperature detector for high temperature micro-tensile test application
Authors: Soe, Oak.
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2012
Abstract: As the demand for MEMS devices operating in high temperature environment is increasing, it is important to ensure and improve the reliability of the devices. In this project, test structure with integrated metal thin film micro-heater and resistance temperature detector was used for high temperature micro-tensile test. Instead of furnace which requires heating of other equipment components, localized resistive heating method by using integrated titanium/platinum (Ti/Pt) thin film micro-heater was proposed. This report describes the development of a novel high temperature micro-tensile test and design consideration of the test structure. Electro-thermal performance of the integrated micro-heater was first analysed, followed by the micro-tensile test of single crystal silicon (SCS) test specimen with (100) surface orientation and <110> tensile direction at elevated temperatures, up to 300 °C. Effect of temperature on the Young’s modulus was presented with the experimental results.
URI: http://hdl.handle.net/10356/50910
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Student Reports (FYP/IA/PA/PI)

Files in This Item:
File Description SizeFormat 
EA6083-112.pdf
  Restricted Access
2.84 MBAdobe PDFView/Open

Page view(s) 50

219
checked on Oct 31, 2020

Download(s) 50

10
checked on Oct 31, 2020

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.