Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5098
Title: A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films
Authors: Cheng, Hao
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2005
Source: Cheng, H. (2005). A study on the orientated growth, microstructure and thermal conductivity of RF reactively sputtered AIN films. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: In this study AIN films have been deposited by reactive sputtering in argon and nitrogen gas mixture. The orientated growth in the sputtered AIN films has been systematically studied.
URI: https://hdl.handle.net/10356/5098
DOI: 10.32657/10356/5098
Rights: Nanyang Technological University
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MSE Theses

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