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Title: Defects of thin films on silicon wafer
Authors: Tang, Shiau Khee.
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2002
Abstract: Borophosphosilicate glass (BPSG) is a popular dielectric thin film used in the fabrication of semiconductor devices. However, the addition of dopants like boron and phosphorus creates some defects on these thin films and that reduces the reliability of IC devices. In this work, a systematic investigation was carried out to characterize the defect in BPSG films.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MSE Theses

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