Silicon incorporated amorphous carbon films for BioMEMS application
Ong, Soon Eng
Date of Issue2008
School of Mechanical and Aerospace Engineering
Amorphouscarbon(aC) or most commonly known as diamond like carbon(DLC)is traditionally used as a protective or passivation coatings. The prospect of a C, specifically low stress or stress free film for use in microelectro mechanical systems(MEMS)has stirred up quite an interest in the scientific community. In the as deposited state, the material exhibits extremely high compressive stress. In order for the micro machined structures to work, the films must have very low stress and very low stress gradients. Preliminary studies have shown Si doping not only reduces the stress, it can improve the haemocompatibility of a Caswell. Therefore, Si doped a-C is suitable for MEMS devices in medical applications. Amorphous carbon containing Si (aC(Si)) exhibits some very desirable characteristics.
Nanyang Technological University