Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5326
Title: Design of a tracking system for semiconductor equipment
Authors: Vijendran, M.
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2001
Abstract: The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment.
URI: http://hdl.handle.net/10356/5326
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

Files in This Item:
File Description SizeFormat 
MAE-THESES_1073.pdf
  Restricted Access
3.33 MBAdobe PDFView/Open

Page view(s) 50

256
Updated on Apr 18, 2021

Download(s)

1
Updated on Apr 18, 2021

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.