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Title: Development of MEMS RF inductors on silicon wafers
Authors: Wang, Guang Yu
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2002
Abstract: In this project, a micromachined inductor on silicon wafer is presented.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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