Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5359
Title: Development of high performance micromechanical resonators for advanced sensing applications
Authors: Wang, Xiaowei
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2005
Source: Wang, X. (2005). Development of high performance micromechanical resonators for advanced sensing applications. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: Three types of micro-resonators using MEMS technology and relevant technical achievements have been realized and introduced in this works.
URI: https://hdl.handle.net/10356/5359
DOI: 10.32657/10356/5359
Rights: Nanyang Technological University
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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