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https://hdl.handle.net/10356/5359
Title: | Development of high performance micromechanical resonators for advanced sensing applications | Authors: | Wang, Xiaowei | Keywords: | DRNTU::Engineering::Manufacturing | Issue Date: | 2005 | Source: | Wang, X. (2005). Development of high performance micromechanical resonators for advanced sensing applications. Doctoral thesis, Nanyang Technological University, Singapore. | Abstract: | Three types of micro-resonators using MEMS technology and relevant technical achievements have been realized and introduced in this works. | URI: | https://hdl.handle.net/10356/5359 | DOI: | 10.32657/10356/5359 | Schools: | School of Mechanical and Aerospace Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Theses |
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MAE-THESES_1102.pdf | 4.48 MB | Adobe PDF | ![]() View/Open |
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