Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5427
Title: Development of condenser silicon microphones using deep RIE micromachining technology
Authors: Xu, Cong.
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2002
Abstract: During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance devices where competition on a cost basis dominates.
URI: http://hdl.handle.net/10356/5427
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

Files in This Item:
File Description SizeFormat 
MAE-THESES_1164.pdf
  Restricted Access
2.64 MBAdobe PDFView/Open

Page view(s)

259
Updated on Jan 24, 2021

Download(s)

3
Updated on Jan 24, 2021

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.