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https://hdl.handle.net/10356/5427
Title: | Development of condenser silicon microphones using deep RIE micromachining technology | Authors: | Xu, Cong. | Keywords: | DRNTU::Engineering::Manufacturing | Issue Date: | 2002 | Abstract: | During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance devices where competition on a cost basis dominates. | URI: | http://hdl.handle.net/10356/5427 | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Theses |
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MAE-THESES_1164.pdf Restricted Access | 2.64 MB | Adobe PDF | View/Open |
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