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https://hdl.handle.net/10356/5429| Title: | Microforce sensor design and fabrication | Authors: | Xu, Guoming. | Keywords: | DRNTU::Engineering::Manufacturing::Product engineering | Issue Date: | 2004 | Abstract: | Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bridge circuit configuration. | URI: | http://hdl.handle.net/10356/5429 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| MAE-THESES_1166.pdf Restricted Access | 9.3 MB | Adobe PDF | View/Open |
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