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Title: Studies on digital holography and interferometric application in micromeasurement
Authors: Xu, Lei.
Keywords: DRNTU::Engineering::Manufacturing::Metrology
Issue Date: 2003
Abstract: With the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in this thesis. In this thesis, the pressure sensor is employed as a typical example.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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