Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5436
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dc.contributor.authorXu, Lei.en_US
dc.date.accessioned2008-09-17T10:50:33Z-
dc.date.available2008-09-17T10:50:33Z-
dc.date.copyright2003en_US
dc.date.issued2003-
dc.identifier.urihttp://hdl.handle.net/10356/5436-
dc.description.abstractWith the aim to improve the system performance and further extend the application scope to the rapidly growing microelectromechanical system (MEMS) engineering, the methodology of in-line digital micro-holo-interferometry (IDMHI) is proposed and its performance in micromeasurement is studied in this thesis. In this thesis, the pressure sensor is employed as a typical example.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Manufacturing::Metrology-
dc.titleStudies on digital holography and interferometric application in micromeasurementen_US
dc.typeThesisen_US
dc.contributor.supervisorMiao, Jianminen_US
dc.contributor.schoolSchool of Mechanical and Production Engineeringen_US
dc.description.degreeDoctor of Philosophy (MPE)en_US
dc.contributor.supervisor2Asundi, Anand Krishnaen_US
item.grantfulltextrestricted-
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