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dc.contributor.authorWang, Yilai.
dc.description.abstractIn the report, we apply the supervisory control theory to design a controller. We firstly introduce the basic concepts of supervisory control and illustrate a simple two automata share a common resource. The development process of a supervisory controller is shown through the example. Secondly, we consider the application of the theory to a linear cluster tool, wafer making process which requires wafers to travel through all processing machines without any conflict and deadlock. Automata models are built to replicate the behaviors of the system, and a controller is designed to control the system. Lastly, we install the controller on a virtual plant to simulate the wafer making process.en_US
dc.format.extent53 p.en_US
dc.rightsNanyang Technological University
dc.subjectDRNTU::Engineering::Electrical and electronic engineeringen_US
dc.titleHeterarchical supervisory control of a linear cluster toolen_US
dc.typeFinal Year Project (FYP)en_US
dc.contributor.supervisorSu Rongen_US
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.description.degreeBachelor of Engineeringen_US
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Appears in Collections:EEE Student Reports (FYP/IA/PA/PI)
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