Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/54392
Title: Heterarchical supervisory control of a linear cluster tool
Authors: Wang, Yilai.
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2013
Abstract: In the report, we apply the supervisory control theory to design a controller. We firstly introduce the basic concepts of supervisory control and illustrate a simple two automata share a common resource. The development process of a supervisory controller is shown through the example. Secondly, we consider the application of the theory to a linear cluster tool, wafer making process which requires wafers to travel through all processing machines without any conflict and deadlock. Automata models are built to replicate the behaviors of the system, and a controller is designed to control the system. Lastly, we install the controller on a virtual plant to simulate the wafer making process.
URI: http://hdl.handle.net/10356/54392
Schools: School of Electrical and Electronic Engineering 
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Student Reports (FYP/IA/PA/PI)

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