Please use this identifier to cite or link to this item:
Title: Wafer fabrication cycle time report
Authors: Cheng, Hao Fen.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Issue Date: 2013
Abstract: Wafer Fabrication Process is the starting point of making any integrated circuit (IC) products and is a complex process which goes through more than 900 operational steps before shipping for assembly and test. This makes the control of wafer fabrication process very challenging and the results can be very encouraging. Cycle time is the elapsed time from the releasing of blank silicon wafers into the fabrication process until completion of fabrication on those wafers, which is the key parameter to monitor and control the wafer fabrication process. In this project we are focusing on the wafer fabrication cycle time report Autobahn Report, which calculates and estimates the cycle time categorized by work shift and work weight based on real time production data. In addition to providing more accurate circle time by employing improved calculation algorithm, Autobahn report also allows to keep track of circle time by tagging into different type of wafers for different purposes. Lastly it highlights the variance of the real step cycle time and target step cycle time to monitor the bottleneck of the fabrication process. The presentation of this dissertation is based on the waterfall model in the sequential order of report analysis, report design, implementation and conclusion.
Schools: School of Electrical and Electronic Engineering 
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Student Reports (FYP/IA/PA/PI)

Files in This Item:
File Description SizeFormat 
  Restricted Access
2.53 MBAdobe PDFView/Open

Page view(s) 20

Updated on Jun 20, 2024

Download(s) 50

Updated on Jun 20, 2024

Google ScholarTM


Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.