Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5500
Title: Micro EDM process
Authors: Chen, Yit Chien.
Keywords: DRNTU::Engineering::Manufacturing::Product engineering
Issue Date: 2005
Abstract: The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS or micro molds for MEMS components. Studies on machining on silicon and stainless steel micro mechanical components are dominant.
URI: http://hdl.handle.net/10356/5500
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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