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Title: Chemical characteristics of diamond-like carbon films
Authors: Zeng, Aiping
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2002
Abstract: In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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