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https://hdl.handle.net/10356/5512| Title: | Chemical characteristics of diamond-like carbon films | Authors: | Zeng, Aiping | Keywords: | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films | Issue Date: | 2002 | Abstract: | In this work, a capacitance method of electrochemical impedance spectroscopy (EIS) has been developed to detect and evaluate nano pores in diamond-like carbon (DLC) films. | URI: | http://hdl.handle.net/10356/5512 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| MAE-THESES_1240.pdf Restricted Access | 662.08 kB | Adobe PDF | View/Open |
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