Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5513
Title: Preparation of shape-memory-alloy thin film for actuator
Authors: Zhang, Cengling
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2001
Abstract: NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated.
URI: http://hdl.handle.net/10356/5513
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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