Fabrication of very high aspect micromold by SU-8 photolithography and electroforming

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Author
Zhang, Jun
Date of Issue
2007
School
School of Mechanical and Aerospace Engineering
Abstract
Microstructures with very high aspect ratio (VHAR) have diverse applications because the increased surface area leads to increased volume handling and sensitivity desired for many MicroElectro Systems (MEMS).
Subject
DRNTU::Engineering::Manufacturing
Type
Thesis
Rights
Nanyang Technological University
Collections
https://doi.org/10.32657/10356/5524
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