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Title: Co2 laser annealing of Niti (shape memory) thin films for mems applications
Authors: He, Qiang.
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Issue Date: 2004
Abstract: A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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