Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5868
Title: Characterization of mechanical properties of microfabricated film
Authors: Khoo, Hwa Seng.
Keywords: DRNTU::Engineering::Materials::Mechanical strength of materials
Issue Date: 2003
Abstract: This paper reports on the development of a tester capable of measuring the submicron level deformation of microfabricated films deformed by a compressive force of micro-Newton range.
URI: http://hdl.handle.net/10356/5868
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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