Please use this identifier to cite or link to this item:
|Title:||Design and simulation of microgyroscope||Authors:||Leong, Chee Yong.||Keywords:||DRNTU::Engineering::Mechanical engineering::Bio-mechatronics||Issue Date:||2005||Abstract:||Micromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of the most highly sought after silicon based micro sensors. Micro- Electro-Mechanical System (MEMS) gyroscopes have attracted a lot of attention for its potential wide range of applications. They can be deployed in automotive applications, such as in navigation, safety and stability system; consumer electronic applications such as video camera stabilization, virtual reality gaming, inertial mouse pointer, etc and military applications. Inspired by the successful commercialization of micromachined accelerometer, various research and industrial institutions have focused on the design and development of high performance and low cost microgyroscope. In this project, a micromachined gyroscope fabricated on SOI wafer is presented.||URI:||http://hdl.handle.net/10356/5957||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.