Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/5957
Full metadata record
DC FieldValueLanguage
dc.contributor.authorLeong, Chee Yong.en_US
dc.date.accessioned2008-09-17T11:03:18Z-
dc.date.available2008-09-17T11:03:18Z-
dc.date.copyright2005en_US
dc.date.issued2005-
dc.identifier.urihttp://hdl.handle.net/10356/5957-
dc.description.abstractMicromachined inertial sensors, consisting of accelerometers and gyroscopes are considered as one of the most highly sought after silicon based micro sensors. Micro- Electro-Mechanical System (MEMS) gyroscopes have attracted a lot of attention for its potential wide range of applications. They can be deployed in automotive applications, such as in navigation, safety and stability system; consumer electronic applications such as video camera stabilization, virtual reality gaming, inertial mouse pointer, etc and military applications. Inspired by the successful commercialization of micromachined accelerometer, various research and industrial institutions have focused on the design and development of high performance and low cost microgyroscope. In this project, a micromachined gyroscope fabricated on SOI wafer is presented.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Mechanical engineering::Bio-mechatronics-
dc.titleDesign and simulation of microgyroscopeen_US
dc.typeThesisen_US
dc.contributor.supervisorMiao, Jianminen_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.description.degreeMaster of Science (Micro Electro Mechanical Systems Engineering)en_US
item.grantfulltextrestricted-
item.fulltextWith Fulltext-
Appears in Collections:MAE Theses
Files in This Item:
File Description SizeFormat 
MAE-THESES_455.pdf
  Restricted Access
11.28 MBAdobe PDFView/Open

Page view(s)

229
Updated on Nov 26, 2020

Download(s) 5

2
Updated on Nov 26, 2020

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.