On-line shape measurement using micro-optics
Date of Issue2005
School of Mechanical and Aerospace Engineering
Physical objects have three dimensional structures(3D). So that a profilometer that produce a 3D profile is invaluable. With the increasing demand for micro-products and bioengineering research, resolutions of 3D profiles with micrometer scale are becoming commonplace. In addition development of large scale production and the real time life science microstructure profile inspection need high-speed display and real-time inspection. The configuration of sensor array detection makes the detection speed much faster than single sensor detection because of sensor array inspects area without lateral scanning. This thesis introduces a multi-channel 3D profile inspection system to realize fast speed inspection with resolution of better than Fiber coupler is introduced in the system as to study and resolve the cross-talk problem.
Nanyang Technological University