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https://hdl.handle.net/10356/6003| Title: | Design and fabrication of single wafer mems accelerometers with optimized flexures | Authors: | Lim, Chun Kiat. | Keywords: | DRNTU::Engineering::Manufacturing | Issue Date: | 2004 | Abstract: | A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer. | URI: | http://hdl.handle.net/10356/6003 | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Theses |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| MAE-THESES_497.pdf Restricted Access | 10.55 MB | Adobe PDF | View/Open |
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