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|Title:||Design and fabrication of single wafer mems accelerometers with optimized flexures||Authors:||Lim, Chun Kiat.||Keywords:||DRNTU::Engineering::Manufacturing||Issue Date:||2004||Abstract:||A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer.||URI:||http://hdl.handle.net/10356/6003||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
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