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Title: Design and fabrication of single wafer mems accelerometers with optimized flexures
Authors: Lim, Chun Kiat.
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2004
Abstract: A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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