Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/60651
Title: Analysis, scheduling and planning in wafer fabrication systems
Authors: Citra Pramesti
Toh, Kai Aik
Zhang, Bo
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2004
Abstract: The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited. The three individual themes are closely interlinked with emphasis on the operational planning of the fab.
URI: http://hdl.handle.net/10356/60651
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:SMA Theses

Files in This Item:
File Description SizeFormat 
Citra2004.pdf
  Restricted Access
Main Report1.32 MBAdobe PDFView/Open

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.