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Title: Analysis, scheduling and planning in wafer fabrication systems
Authors: Citra Pramesti
Toh, Kai Aik
Zhang, Bo
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2004
Abstract: The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited. The three individual themes are closely interlinked with emphasis on the operational planning of the fab.
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:SMA Theses

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