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Title: Micro-machining of silicon and metals using femtosecond laser
Authors: Koh, Wee Leong
Wang, Lei
Wong, Thai Yuan
Zhang, Yilei
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2002
Abstract: The objective of this project is to investigate the application of femtosecond lasers to micromachining. Specifically, the effects of the femtosecond laser on silicon and metals will be explored. Two specific applications will be considered in this investigation, they are the dicing of silicon wafers and manufacturing of metallic stents. The work done includes the optimization of the laser cutting process and an investigation of the key effects. A simulation of the laser cutting process on silicon was developed. The machining of a planer stent pattern using the femtosecond laser was also carried out.
Schools: School of Mechanical and Aerospace Engineering 
Research Centres: Singapore-MIT Alliance Programme 
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:SMA Theses

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