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Title: Tape casting of dielectric ALN substrate for microelectronic applications
Authors: Long, Yi.
Keywords: DRNTU::Engineering::Mechanical engineering::Mechatronics
Issue Date: 2001
Abstract: The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match with silicon and high mechanical strength.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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