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https://hdl.handle.net/10356/6101| Title: | Fabrication of 3D microstructures using focused ion beam milling | Authors: | Loo, Yee Wei. | Keywords: | DRNTU::Engineering::Manufacturing | Issue Date: | 2003 | Abstract: | This research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling. | URI: | http://hdl.handle.net/10356/6101 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| MAE-THESES_585.pdf Restricted Access | 14.98 MB | Adobe PDF | View/Open |
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