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https://hdl.handle.net/10356/6167| Title: | Ion beam micromachining of crystalline solids | Authors: | Mohammad Yeakub Ali. | Keywords: | DRNTU::Engineering::Manufacturing | Issue Date: | 2002 | Abstract: | In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness. | URI: | http://hdl.handle.net/10356/6167 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| MAE-THESES_644.pdf Restricted Access | 1.86 MB | Adobe PDF | View/Open |
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