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Title: Ion beam micromachining of crystalline solids
Authors: Mohammad Yeakub Ali.
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2002
Abstract: In this thesis, mathematical models are developed from the FIB sputtering parameters and the substrate material properties for the calculation of surface roughness.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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