Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/6175
Title: Investigation of micro-EDM controllable factors on machined silicon surface quality
Authors: Nachiappan Ravi
Keywords: DRNTU::Engineering::Manufacturing::Product engineering
Issue Date: 2000
Abstract: The present study examines the effect of interaction of micro-EDM controllable factors such as discharge-energy, traverse speed and feed rate on the surface integrity with p-type boron-doped silicon. The average surface roughness is quantitatively correlated to input discharge-energy. Further an empirical relationship was computed between the average surface roughness and area fraction of voids. Next, a DOE (Design of Experiment) technique is adopted to describe specifically the interaction effect of the input controllable factors such as traverse speed and feed rate on the average surface roughness. Subsequently, a second order polynomial model that can adequately describe the relationship between the same is found.
URI: http://hdl.handle.net/10356/6175
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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