Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/6180
Title: Non-mechanical and instantaneous phase-shifting technique for surface profiling
Authors: Narayanswamy R. Sivakumar
Keywords: DRNTU::Engineering::Manufacturing::Metrology
Issue Date: 2002
Abstract: In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantaneous phase shifting technique to a novel common path optical layout.
URI: http://hdl.handle.net/10356/6180
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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