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|Title:||Non-mechanical and instantaneous phase-shifting technique for surface profiling||Authors:||Narayanswamy R. Sivakumar||Keywords:||DRNTU::Engineering::Manufacturing::Metrology||Issue Date:||2002||Abstract:||In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantaneous phase shifting technique to a novel common path optical layout.||URI:||http://hdl.handle.net/10356/6180||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
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