Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/6180
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dc.contributor.authorNarayanswamy R. Sivakumaren_US
dc.date.accessioned2008-09-17T11:08:49Z
dc.date.available2008-09-17T11:08:49Z
dc.date.copyright2002en_US
dc.date.issued2002
dc.identifier.urihttp://hdl.handle.net/10356/6180
dc.description.abstractIn this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantaneous phase shifting technique to a novel common path optical layout.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Manufacturing::Metrology
dc.titleNon-mechanical and instantaneous phase-shifting technique for surface profilingen_US
dc.typeThesisen_US
dc.contributor.supervisorNgoi, Bryan Kok Annen_US
dc.contributor.schoolSchool of Mechanical and Production Engineeringen_US
dc.description.degreeDoctor of Philosophy (MPE)en_US
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