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Title: Non-mechanical and instantaneous phase-shifting technique for surface profiling
Authors: Narayanswamy R. Sivakumar
Keywords: DRNTU::Engineering::Manufacturing::Metrology
Issue Date: 2002
Abstract: In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantaneous phase shifting technique to a novel common path optical layout.
Schools: School of Mechanical and Production Engineering 
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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