A survey on miniature devices and their fabrication for medical applications

Abstract

This dissertation gives a literature survey on different miniature devices for medical applications. Such miniature devices also known as microsystem technology devices consist of sensors, mechanical actuators, electronic parts, and processors in an integrated system. Currently available techniques for forming these micromechanical devices are discussed. The two findamental techniques in microfabrication technology are namely silicon bulk and surface micromachining. Extension of the basic processes by using electro-precision machining, laser-assisted etching, photoforming, stereolithography and chemical/biological microparticles techniques, incorporating additional structural and sacrificial layers will provide even more flexibility in the design of micromechanical systems. With X-ray lithography, an electrode patterns linewidth of less than 20 nm can be achieved.