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dc.contributor.authorNg, Yin Mei.en_US
dc.description.abstractThis dissertation gives a literature survey on different miniature devices for medical applications. Such miniature devices also known as microsystem technology devices consist of sensors, mechanical actuators, electronic parts, and processors in an integrated system. Currently available techniques for forming these micromechanical devices are discussed. The two findamental techniques in microfabrication technology are namely silicon bulk and surface micromachining. Extension of the basic processes by using electro-precision machining, laser-assisted etching, photoforming, stereolithography and chemical/biological microparticles techniques, incorporating additional structural and sacrificial layers will provide even more flexibility in the design of micromechanical systems. With X-ray lithography, an electrode patterns linewidth of less than 20 nm can be achieved.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Mechanical engineering::Bio-mechatronics-
dc.titleA survey on miniature devices and their fabrication for medical applicationsen_US
dc.contributor.supervisorNg, Wan Singen_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.description.degreeMaster of Science (Biomedical Engineering)en_US
dc.contributor.supervisor2Gong, Fengen_US
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