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https://hdl.handle.net/10356/6317| Title: | Design of CIM environment for automated wafer manufacturing process cell system | Authors: | Channaiah B. Ramakumar. | Keywords: | DRNTU::Engineering::Manufacturing::Production management | Issue Date: | 2002 | Abstract: | This thesis focuses on the issues concerned with the design of Computer Integrated Manufacturing (CIM) environment based on Semiconductor Equipment and Materials International (SEMI) guidelines and SEMATECH standards framework used in shop floor information control system for wafer manufacturing process system. | URI: | http://hdl.handle.net/10356/6317 | Schools: | School of Mechanical and Production Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | MAE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| MAE-THESES_78.pdf Restricted Access | 5.38 MB | Adobe PDF | View/Open |
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