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https://hdl.handle.net/10356/6329
Title: | Processing and characterization of high permeability thin-film for micro rotating gyroscope development | Authors: | Tjeung, Ricky Theodore | Keywords: | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films | Issue Date: | 2005 | Source: | Tjeung, R. T. (2005). Processing and characterization of high permeability thin-film for micro rotating gyroscope development. Master’s thesis, Nanyang Technological University, Singapore. | Abstract: | The main intention of this project | URI: | https://hdl.handle.net/10356/6329 | DOI: | 10.32657/10356/6329 | Schools: | School of Mechanical and Aerospace Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Theses |
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MAE-THESES_790.pdf | 3.72 MB | Adobe PDF | ![]() View/Open |
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